浸没式光刻机浸液系统技术研究
发表时间:2018-03-22 16:46:33
一、成果简介
浸没式光刻机是目前实现45nm及以下线宽集成电路制造的核心装备，其自主研制是我国形成高性能集成电路产品自主制造能力必须突破的关键瓶颈。2016年国务院印发的《“十三五”国家科技创新规划》将“突破浸没式光刻机及核心部件”作为国家科技重大专项（02专项）的关键任务之一。浸液系统是浸没式光刻机的四大核心部件之一，用于制备超洁净的浸没液体，并控制其填充于末端物镜和硅片之间，起到液体镜头的作用，进而提高光刻机的数值孔径与曝光分辨率。
自2004年起，项目组在02专项课题、863及国家自然科学基金等项目资助下，开展光刻机浸液系统技术研究，以基础前沿研究促进重大专项的关键技术突破与创新，面向直接影响光刻机曝光分辨率、产率与良品率的浸液系统三大技术难题：扫描牵拉残留液滴/液膜、曝光流场污染与应力、两相回收诱发振动，在浸没流体界面行为及其控制、浸没流场分布形态检测与污染物控制、气液两相流态调制与振动抑制等方面取得了一系列原创性成果。
基于以上研究成果，项目组发表SCI期刊论文40余篇，获授权发明专利60余项。2017年，所研制的45nm浸液系统样机（含超纯水系统、超纯气系统、输控与回收系统、浸没单元、磁浮隔振机构等）通过了整机单位的现场考核与02专项专家组的验收，项目组还获得新一轮重大专项资助，承担28nm浸液系统产品研制任务。
二、重要论文及获奖
1. Yingnan Shen, Liang Hu, Wenyu Chen, Haibo Xie, Xin Fu, Drop encapsulated in bubble: A new encapsulation structure, Physical Review Letters, 2018, 120(5): 1~5
2. Yingnan Shen, Liang Hu, Wen-yu Chen, Xin Fu, Periodic and aperiodic bubbling in submerged gas-liquid jets through a micro-channel, Physics of Fluids, 2017, 29: 047104
3. Liang Hu, Min Wu, Wenyu Chen, Haibo Xie, Xin Fu, Discontinuous pinning effect by a hole row to the gas-liquid interface in a parallel gap, Experimental Thermal and Fluid Science, 2017, 87: 50-59
4. Xin Fu，Yao Huang，Liang Hu，Haibo Xie，W Chen Flow behavior control in immersion lithography, Flow Measurement and Instrumentation 2017, 53: 190-203
5. Longhui Qin, Liang Hu, Kai Mao, Wenyu Chen, Xin Fu, Flow profile identification with multipath transducers, IEEE Sensors Journal, 2017, 17(12): 3625-3634
6. Liang Hu, Yao Huang, Wenyu Chen, Xin Fu, Haibo Xie, Pinning effects of wettability contrast on pendant drops on chemically patterned surfaces, Langmuir, 2016, 32(45): 11780-11788
7. Liang Hu, Mingbo Li, Wenyu Chen, Haibo Xie, Xin Fu, Bubbling behaviors induced by gas-liquid mixture permeating through a porous medium, Physics of Fluids, 2016, 28(8): 1-20
8. Liang Hu, Yingnan Shen, Wenyu Chen, Xin Fu, Experimental investigation on submerged gas-liquid mixture injection into water through a micro-channel, International Journal of Multiphase Flow, 2016, 83: 39-50
9. Liang Hu, Qi Liu, Wenyu Chen, Haibo Xie, Xin Fu, Normalizing study on the characteristic size of the stable cavity induced by a gas-jet penetrating into a liquid sheet, Experimental Thermal and Fluid Science 2016, 70: 228-235
10. Qi Liu, Wenyu Chen, Liang Hu, Haibo Xie, Xin Fu, Experimental investigation of cavity stability for a gas-jet penetrating into a liquid sheet, Physics of Fluids, 2015, 27(8): 1-11