超精密制造与检测技术研究
发表时间:2018-03-22 16:49:16
一、成果简介
面向国防军工、航空航天、光学及光电子仪器、高档医疗设备等领域高精度制造需求，研发超精密智能制造与在位/在线测量技术，改变陶瓷、蓝宝石等硬脆材料部件、特种精密光学及光电元器件的制造工艺与流程，提升制造精度和加工效率，并开展加工与检测装备、智能传感与检测单元等产业化及相关技术服务。
自2004年起，项目组在02专项课题、863及国家自然科学基金等项目资助下，开展光刻机浸液系统技术研究，以基础前沿研究促进重大专项的关键技术突破与创新，面向直接影响光刻机曝光分辨率、产率与良品率的浸液系统三大技术难题：扫描牵拉残留液滴/液膜、曝光流场污染与应力、两相回收诱发振动，在浸没流体界面行为及其控制、浸没流场分布形态检测与污染物控制、气液两相流态调制与振动抑制等方面取得了一系列原创性成果。
基于以上研究成果，项目组发表SCI期刊论文40余篇，获授权发明专利60余项。2017年，所研制的45nm浸液系统样机（含超纯水系统、超纯气系统、输控与回收系统、浸没单元、磁浮隔振机构等）通过了整机单位的现场考核与02专项专家组的验收，项目组还获得新一轮重大专项资助，承担28nm浸液系统产品研制任务。
二、重要论文及获奖
1. Yingnan Shen, Liang Hu, Wenyu Chen, Haibo Xie, Xin Fu, Drop encapsulated in bubble: A new encapsulation structure, Physical Review Letters, 2018, 120(5): 1~5
2. Yingnan Shen, Liang Hu, Wen-yu Chen, Xin Fu, Periodic and aperiodic bubbling in submerged gas-liquid jets through a micro-channel, Physics of Fluids, 2017, 29: 047104
3. Liang Hu, Min Wu, Wenyu Chen, Haibo Xie, Xin Fu, Discontinuous pinning effect by a hole row to the gas-liquid interface in a parallel gap, Experimental Thermal and Fluid Science, 2017, 87: 50-59
4. Xin Fu，Yao Huang，Liang Hu，Haibo Xie，W Chen Flow behavior control in immersion lithography, Flow Measurement and Instrumentation 2017, 53: 190-203
5. Longhui Qin, Liang Hu, Kai Mao, Wenyu Chen, Xin Fu, Flow profile identification with multipath transducers, IEEE Sensors Journal, 2017, 17(12): 3625-3634
6. Liang Hu, Yao Huang, Wenyu Chen, Xin Fu, Haibo Xie, Pinning effects of wettability contrast on pendant drops on chemically patterned surfaces, Langmuir, 2016, 32(45): 11780-11788
7. Liang Hu, Mingbo Li, Wenyu Chen, Haibo Xie, Xin Fu, Bubbling behaviors induced by gas-liquid mixture permeating through a porous medium, Physics of Fluids, 2016, 28(8): 1-20
8. Liang Hu, Yingnan Shen, Wenyu Chen, Xin Fu, Experimental investigation on submerged gas-liquid mixture injection into water through a micro-channel, International Journal of Multiphase Flow, 2016, 83: 39-50
9. Liang Hu, Qi Liu, Wenyu Chen, Haibo Xie, Xin Fu, Normalizing study on the characteristic size of the stable cavity induced by a gas-jet penetrating into a liquid sheet, Experimental Thermal and Fluid Science 2016, 70: 228-235
10. Qi Liu, Wenyu Chen, Liang Hu, Haibo Xie, Xin Fu, Experimental investigation of cavity stability for a gas-jet penetrating into a liquid sheet, Physics of Fluids, 2015, 27(8): 1-11