MEMS谐振器及谐振式传感器研究
发表时间:2018-03-27 11:16:57
一、成果简介
MEMS（微机电系统）传感器具有体积小、功耗低和适于大批量生产等特点，是《“十三五”国家科技创新规划》中先进制造技术的重点发展方向之一。谐振器是指产生谐振频率的电子元件，MEMS谐振器作为基础元件已被应用于滤波器、振荡器、逻辑器件等，同时也可以作为敏感元件应用于谐振式传感器，把被测参量转换为频率信号，实现类数字信号输出，具有高精度和抗干扰的优点。
自2013年起，项目组在自然科学基金等项目资助下，开展MEMS谐振器及谐振式传感器研究，研究成果包括：（1）研究谐振式加速度计，利用鱼骨形双端固定音叉谐振元件，实现1阶至10阶多个模态大振幅谐振，谐振频率调制范围138~913 kHz；通过调节谐振元件模态，实现3档位灵敏度加速度计，使加速度计能够适应不同的测试范围。（2）研究谐振式电荷传感器，提出了双杠杆平衡机构，解决了杠杆放大过程中谐振器的失衡问题，使得电荷传感器的分辨率达到21 fC；采用静电式驱动器调节感应电容的初始值，从而实现灵敏度可调机构，扩宽测试范围, 最高灵敏度为1.03*10-2 Hz/fC2，分辨率达到1fC以下，灵敏度调整范围91.6%。（3）通过AlN压电薄膜和表面掺杂的硅层实现器件的温度补偿，大幅度减少温度变化对器件的影响，利用氧化石墨烯作为湿敏材料，器件实现了42.08 kHz/%RH的高灵敏度，同时具备快速的测试反应和恢复速度。
基于以上研究成果，项目组发表SCI期刊论文20余篇，获授权发明专利3余项。
二、重要论文及获奖
[1] Xuying Chen, Xinxin Liu, Tao Wang, Xianhao Le, Fangyi Ma, Chengkuo Lee and Jin Xie*, "Piezoelectric Micromachined Ultrasonic Transducers with Low Thermoelastic Dissipation and High Quality Factor", Journal of Micromechanics and Microengineering, 28 (2018) 057001.
[2] Dongyang Chen, Jiuxuan Zhao, Yong Wang, Zhonggui Xu, Jin Xie*, “Sensitivity manipulation on micro-machined resonant electrometer toward high resolution and large dynamic range”, Applied Physics Letters, 112, 013502, 2018.
[3] Xianhao Le, Xiaoyi Wang, Jintao Pang, Yingjun Liu, Bo Fang, Zhen Xu, Chao Gao, Yang Xu, Jin Xie*,"A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure", Sensors and Actuators B (Chemical), 2018, 255: 2454-2461.
[4] Hong Ding, Wen Wang, Bing-Feng Ju and Jin Xie*, "A MEMS Resonant Accelerometer with Sensitivity Enhancement and Adjustment Mechanisms", Journal of Micromechanics and Microengineering, 27 (2017) 115010.
[5] Yong Wang, Zhonggui Xu, Yinshen Wang and Jin Xie*,"A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors", Sensors, 17(8), 2017, p1813.
[6] Hong Ding, Xianhao Le and Jin Xie*,"A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator with Selectable Higher Modes", IEEE/ASME Journal of Microelectromechanical Systems, v26, n24, 2017.
[7] Dongyang Chen, Jiuxuan Zhao, Yinshen Wang and Jin Xie*,"An Electrostatic Charge Sensor Based on Micro Resonator with Sensing Scheme of Effective Stiffness Perturbation", Journal of Micromechanics and Microengineering, 27 (2017) 065002.
[8] Yixiang Wang, Hong Ding, Xianhao Le, Wen Wang and Jin Xie*,"A MEMS piezoelectric In-plane Resonant Accelerometer Based on Aluminum Nitride with Two-stage Micro-leverage Mechanism", Sensors and Actuators A, 2017, 254: 126-133.
[9] Jiuxuan Zhao, Minliang Liu, Liang Liang, Wen Wang, Jin Xie*, "Airborne Particulate Matter Classification and Concentration Detection Based on 3D Printed Virtual Impactor and Quartz Crystal Microbalance Sensor", Sensors and Actuators A, 238 (2016) 379–388.
[10] Hong Ding, Jiuxuan Zhao, Bing-Feng Ju and Jin Xie*, "A High-Sensitivity Biaxial Resonant Accelerometer with Two-stage Microleverage Mechanisms", Journal of Micromechanics and Microengineering,26 (2016) 015011.
[11] Jiuxuan Zhao, Hong Ding, Jin Xie* , “Electrostatic charge sensor based on a micromachined resonator with dual micro-levers”, Applied Physics Letters, 106, 233505, 2015.