扫描探针跨尺度精密测量技术及仪器
发表时间:2018-03-27 11:24:19
一、成果简介
深沟槽微纳结构、光学自由曲面等是MEMS、高精度光电系统中广泛采用的结构。对其进行超精密检测是目前微纳制造和超精密加工领域的前沿课题。目前尚无测量设备能够满足其所需要的大面积、高深-宽比、跨尺度测量要求。项目研发可适用于大面积、高深-宽比微纳计量的跨尺度、超精密测量装备。发展了“探头-样品”副耦合特性理论及其稳态控制策略，实现了深沟槽微纳结构、高精度光学自由曲面等结构的超精密测量。
二、重要论文及获奖
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3. Bai X, Fang Y, Lin W, et al. Saliency-Based Defect Detection in Industrial Images by Using Phase Spectrum[J]. IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS. 2014, 10(4): 2135-2145.
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8. Bai X, Sun Z, Chen J, et al. A novel technique for the measurement of the acoustic properties of a thin linear-viscoelastic layer using a planar ultrasonic transducer[J]. MEASUREMENT SCIENCE AND TECHNOLOGY. 2013, 24(12560212).